Perrseus

The Perrseus program will develop architectures and processes for µUHV (<10-10 mbar) packages and demonstrate this architecture through the integration of pressure sensors (10-3 mbar to <10-10 mbar) consisting of cold-atom neutral/ion quantum sensors, MEMS, and photonic sensors. Performers must develop µUHV packages that simultaneously meet the needs of MEMS, photonics, and quantum sensing communities, incorporating photonic and electrical interconnects, and demonstrate a manufacturable process. The program is structured into two technical phases: Phase 1 (24 months) focuses on process development, including demonstrating a pressure measurement methodology and starting a process traveler; Phase 2 (18 months) focuses on demonstrating a µUHV system at manufacturing scale, delivering 10 functional µUHV packages, and validating a >3-year lifetime. Performers must also develop a suite of pressure sensors to measure across the range of 10-3 mbar to <10-10 mbar, and ensure compatibility across atomic, MEMS, and photonic tooling and materials.